PSLSpheres.com
Owns suspended PSL selection, particle properties, concentration and metrology concepts.
Workflow
Suspended PSL is an input; the wafer standard is the artifact
- Select the particle size node and concentration appropriate to the deposition system.
- Prepare or use a qualified PSL suspension under the deposition method.
- Deposit particles onto a defined wafer surface and pattern.
- Characterize the deposited standard and establish the controlling values.
- Scan the wafer on the SSIS and compare instrument response with the reference.
Critical distinction: a bottle of PSL spheres is not the same product as a finished particle wafer standard.
Product pathways
Standard PSL, SURF-CAL and finished wafers
| Pathway | When it fits | Controlling questions |
|---|---|---|
| Standard aqueous PSL | Custom or general deposition workflow | Size node, concentration, dilution, deposition-system compatibility |
| SURF-CAL | Selected pre-mixed high-concentration SSIS/deposition nodes | Instrument/deposition model, concentration option, selected sizes |
| Finished calibration wafer | Customer needs a characterized wafer artifact | Wafer diameter, substrate, deposition pattern, counts, nodes, tool model |
SSIS compatibility
The scanner defines more than the particle size
- SSIS manufacturer and model.
- Laser wavelength and detection configuration.
- Wafer diameter and surface type.
- Detection threshold and calibration range.
- Spot, full-deposition or other pattern.
- Target count and spatial distribution.
- Reference and certificate requirements.
Cross-property strategy
Use the right authority site
ParticleWaferStandards.com
Owns the finished wafer artifact, deposition patterns, handling and SSIS compatibility.
AppliedPhysicsUSA.com
Owns the commercial product, quote, manufacturing capability and current specifications.
Applied Physics technical pathway
Match the standard to the measurement—not the other way around.
Send the instrument, medium, target size, concentration, certificate and packaging requirements to Applied Physics for a technical recommendation.